Abstract
In conventional microprobe analysis, the samples and standards have a controlled geometry, i.e. flat polished, and infinitely large with respect to the electron beam interaction volume. As a result, the measured x-ray intensities for the analyzed elements vary in a predictable manner with composition and the various elemental concentrations can be calculated from a choice of several analytical algorithms. Unlike conventional analysis, the quantitative analysis of particles with the electron probe presents a very difficult analytical challenge. Most particles are irregularly shaped and do not have controlled geometries. In addition, depending on their size, they may not be “infinitely” thick with respect to the electron beam. Because of the random sizes and shapes, the emitted x-ray intensity from particles may be greater than or less than the intensities from a flat conventional sample of the same composition. A diagram from Armstrong of the interaction between an electron beam and a particle is shown in Fig. 1 and illustrates the “particle” effects that make quantitative particle analysis so difficult.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
