Abstract
Moisture measurement is of great needs in semiconductor industry, combustion diagnosis, meteorology, and atmospheric studies. We present an optical hygrometer based on cavity ring-down spectroscopy (CRDS). By using different absorption lines of H2O in the 1.56 and 1.36 μm regions, we are able to determine the relative concentration (mole fraction) of water vapor from a few percent down to the 10−12 level. The quantitative accuracy is examined by comparing the CRDS hygrometer with a commercial chilled-mirror dew-point meter. The high sensitivity of the CRDS instrument allows a water detection limit of 8 pptv.
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