Abstract
In determining the angular distributions of characteristic X-rays by using rotating inclined target method in EPMA, the accuracy is discussed in detail. The f(χ)-curves obtained from these angular distributions of X-rays are applied to quantitative microanalysis in Cu-Au, Ni-Fe and Fe-Cr alloys. The effect of indirect excitation is calculated by using the depth distribution curves of characteristic X-rays obtained in this experiment. The error of the analysis is within 2% and it is shown that the rotating inclined target method may be applied to quantitative microanalysis with about the same accuracy as the case of normal incidence of electron beam without tedious procedure for absorption correction.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
