Quantitative measurements of oxygen atom and negative ion densities in a low pressure oxygen plasma by cavity ringdown spectroscopy

Abstract

In this paper we report measurements of the absolute concentration of ground state oxygen atoms produced in a low pressure (≤100 mTorr) inductively coupled oxygen plasma. These experiments have utilised cavity ringdown spectroscopy, allowing line of sight absorption to be measured on the optically forbidden 1D ← 3P transition around 630 nm. Both the translational temperature and the absolute concentrations of the two most populated spin–orbit levels (J = 1 and 2) have been determined as a function of plasma pressure at a fixed operating power of 300 W, allowing accurate determination of dissociation fraction; in all cases, the dissociation fraction is considerable, ≥10%, maximising at 15% for 20 mTorr. Time-resolved measurements of the rate of loss of the oxygen atoms when the plasma is extinguished have allowed the probability for wall-loss in the plasma chamber, γ, to be determined; in this case, for an aluminium surface, γ is determined to be ca. a few ×10−3, with the exact value depending on pressure. In addition, the O− number density is shown to be an inverse function of pressure, showing a maximum of 1.6 × 1010 cm−3 at 10 mTorr, falling to 2 × 109 cm−3 at 100 mTorr, and characteristic of a discharge operating in the detachment regime. The measured number densities are interpreted using calculated electron energy distribution functions and yield physically reasonable values for the electron number density.