Abstract
We describe a technique for the quantitative measurement of composition in AlxGa1−xAs heterostructures using a simple solid-state backscattered electron detector in a scanning electron microscope. Calibration data are presented and are shown to be consistent with the Castaing [Adv. Electron. Electron Phys. 13, 317 (1960)] theory. The technique is applied to image representative AlxGa1−xAs heterostructures including a graded index separate confinement heterostructure (GRINSCH) laser structure.
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