Quantitative light element analysis using an energy‐dispersive detector: 3—practical assessment of accuracy and sensitivity

Abstract

AbstractA comparison has been made between light element (5 < Z < 11) analyses performed using energy‐dispersive and wavelength‐dispersive spectrometry. It is shown that, provided appropriate spectrum processing methods are adopted, the two sets of data agree to within 2–3%. Since there is every reason to believe the wavelength‐dispersive measurements are accurate, this demonstrates the feasibility of carrying out quantitative light element analysis by the energy‐dispersive technique. The minimum concentrations of carbon, nitrogen and oxygen which can be detected in selected matrices have been established and it is shown that sensitivities of better than 0.5 wt% are achievable if the electron probe voltage is carefully chosen.