Abstract

The origin of the occurrence of nuclei was quantitatively investigated using a microbalance and an electron microscope. The completion time of preferred nucleation and the time variation of the number density of stable nuclei were expressed in terms of measurable quantities such as the sticking coefficient of the incident vapour beam and the surface diffusion distance of adatoms. An analysis of the experimental results showed that the sum of the calculated values of the completion time of preferred nucleation and the appearance time of nuclei ranged from 2 to 60 s, whereas the time at which nucleus saturation occurred was found to range from 100 to 6000 s. It was concluded that the observed increase in the density of nuclei is caused by random nucleation. The occurrence of nucleus saturation can also be explained on the basis of random nucleation and growth coalescence.

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