Abstract
Infrared (IR) spectroscopy of thin films demands optical arrangements, in which the electric field of the IR radiation interacts as much as possible with the film. Powerful tools to solve this problem are methods like illumination with polarised light at oblique incidence, internal reflection and attenuated total reflection (ATR). These methods have various advantages which will be explained and illustrated on various examples: thin oxide layers on insulators and metals, excitation of surface polaritons in oxide films on Si, restricted penetration depth to avoid an echo from the back of the sample. We have further shown by some unconventional applications of ATR experiments the particular facilities to characterise layered systems. In competition with other analytical methods characterising thin films and surfaces, IR ATR spectroscopy is a fast, non-destructive, and unpretending method of large reliability. The discussed examples of applications may confirm this statement.
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