Abstract

The quantitative on-line analysis of the gaseous products of a nitrogen plasma jet, containing trace amounts of chlorine and boron trichloride, has been carried out. The quantitative analysis of the solid products, boron and boron nitride, has also been carried out by in situ reaction with chlorine followed by gas chromatography. The chlorine attacks the boron and the boron nitride in a specially designed reaction—injection system of the gas chromatography at 500° for a 1-min period. Then, the reaction products are immediately swept into the column through the gas sampling valve. Both of the analyses are carried out with a 2-m Teflon column containing 10% Kel-F 3 on Teflon 6 at 40°. About 1% (v/v) of boron trichloride vapour is incorporated in the carrier gas so as to prevent irreversible adsorption of the small amount of boron trichloride that is to be detected.

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