Quantitative Evaluation of the Batwing Effect on Depth Measurement in Coherence Scanning Interferometry for Rectangular Gratings

Abstract

Coherence scanning interferometry (CSI) is a widely used non-contact method for measuring areal surface topography. The calculation of groove depth typically employs the ‘W/3 rule’ specified in ISO 5436-1. However, the batwing effect causes overshoots near the groove edges, which can introduce noise singularities in the selected W/3 region for depth calculation, thereby affecting the measurement of rectangular grating depth. This paper introduces the definition of batwing height and width and proposes a simulation model that considers various factors, such as the center wavelength, spectrum of the illuminating light, shadow effect, and numerical aperture, to analyze their influence on depth measurement. The simulation results demonstrate that the batwing width is the primary factor influencing depth measurement for small grating periods. Specifically, a decrease in numerical aperture increases the batwing width, leading to larger depth measurement errors, while a decrease in the center wavelength reduces the batwing width, resulting in smaller depth measurement errors. The influence of the illumination spectrum and shadow effect on depth measurement is found to be minor. Experimental validation using a step standard consisting of rectangular gratings with different periods and depths confirms the agreement between the experimental and simulated results. The proposed method provides a quantitative evaluation of depth measurement accuracy in CSI.