Abstract
O− ion flux from the indium tin oxide (ITO) sputter target under Ar ion bombardment is quantitatively evaluated using a calorimetry method. Using a mass spectrometer with an energy analyzer, O− energy distribution is measured with spatial dependence. Directional high-energy O− ion ejected from the target surface is observed. Using a calorimetry method, localized heat flux originated from high-energy O− ion is measured. From absolute evaluation of the heat flux from O− ion, O− particle flux in order of 1018 m−2 s−1 is evaluated at a distance of 10 cm from the target. Production yield of O− ion on the ITO target by one Ar+ ion impingement at a kinetic energy of 244 eV is estimated to be 3.3 × 10−3 as the minimum value.
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