Abstract

A simple procedure for quantitative estimation of the quality and efficiency of digital processing based on discrete wavelet transform (DWT) of X-ray topographic and polarization-optical images for single crystal structure defects is proposed. Digital processing of theoretical and experimental images of defects in a 6H-SiC single crystal has been performed using different wavelet types. It is shown that the brightness characteristics of the analyzed image and differential contrast may be used as a quantitative criterion of the processing quality and efficiency for the chosen wavelet. Theoretical images of typical defects in a single crystal structure calculated by the modified Indenbom-Chamrov equations have been used as a reference object.

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