Abstract

In transmission electron spectroscopy the fundamental formula for elemental quantitation using inner-shell excitations gives the number n of atoms per cm2 contributing to the K-edge aswhere Ik and Io are the integrated intensities in the K-edge and zero-loss peak, respectively. Both of these integrals are measured for a spectrometer acceptance angle 2α and an energy interval ΔE. The parameter αk(α,ΔE) is the ionization cross-section for the same angular and energy parameters. The variation of αk with α and ΔE is a function of the generalized oscillator strength and little detailed information on this quantity is available. Therefore it is necessary to proceed empirically and the simplest assumption is thatwhere σk is a saturation (x-ray) cross-section and ηα,ηΔEcan be identified with efficiency factors.The accuracy of Equation (1) for K-edges from light elements (Li ≤ Z ≤ Al) is being tested by computer curve fitting and background stripping (see Fig. 1).

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