Abstract
Quantitative high resolution electron microscopy (QHREM) involves the detailed comparison of experimental high resolution images with image simulation based on a model and weighted by the estimated uncertainty in the experimental results. For simple metals, such as Al, models have been systematically improved using non-linear least-squares methods to obtain simulated images that are indistinguishable from experimental images within the experimental error. QHREM has also been applied to evaluate the predictions of atomistic simulations of defect structures. In this paper, we summarize the state of the art in QHREM illustrated with results from an Al grain boundary image and identify open issues to be addressed in further research.
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