Quantitative analysis of valence electron energy-loss spectra of aluminium nitride.

Abstract

The optical properties and electronic structure of aluminium nitride are determined using valence electron energy-loss spectroscopy in a dedicated scanning transmission electron microscope. Quantitative analysis of the experimental valence electron energy-loss spectra to determine the electronic structure encompasses single scattering deconvolution of the valence electron energy-loss spectra to calculate the energy-loss function, Kramers-Kronig analysis of the energy-loss function to reveal the complex dielectric function, transformation of the dielectric function into the optical interband transition strength via optical property relations and finally critical-point analysis of the interband transition strength. The influence of both experimental and analytical parameters on the final result was studied systematically to define and improve the understanding of the methods. To check the reliability of this technique the interband transition strength determined was compared with results of vacuum ultraviolet spectroscopy. Good agreement was found if sample preparation was taken into account. The preparation of the specimen for the transmission electron microscopy has an effect on the electronic structure. Quantitative analysis of valence electron energy-loss spectroscopy, using the methods presented, is an important and capable method to determine the electronic structure of materials and it has the benefit of high spatial resolution.