Abstract
A laboratory confocal micro-X-ray fluorescence (XRF) spectrometer based on polycapillary X-ray optics (PXRO) was proposed to carry out the quantitative XRF analysis of single aerosol particles with smaller sizes than that of focal spot of the PXRO. The PXRO in the detection channel can both increase the collecting angle of the detector and lower the minimum detection limits of the XRF spectrometer. In order to reduce the effects of the PXRO on the analysis results, the sensitivities were corrected using a Gaussian function for the quantitative XRF analysis of single aerosol particles.
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