Abstract
In this study, we propose a method to quantitatively analyze the concentration of VOCs adsorbed on zeolite filters via gas chromatography (GC). The sampled VOCs from the filters with ethanol as a solution were characterized using GC to determine the concentration of the adsorbed VOCs by comparing the areas of GC peaks of the detected VOCs and ethanol. The proposed method also enabled determination of the desorption (regeneration) conditions of the zeolite filters according to heating temperature and time for various VOCs. Repeated adsorption and desorption of VOCs on zeolite filters and GC analyses allow us to evaluate the durability and reusability of the filter and could help predict the lifetime of zeolite filters in practice.
Highlights
As the manufacturing of semiconductors has increased over the years, interest in the air pollution and safety issues arising from the manufacturing processes is increasing[1, 2]
We propose a method to analyze the concentration of volatile organic compounds (VOCs) adsorbed by zeolite (ZSM-11) filters using gas chromatography (GC)
We proposed a method to analyze the concentration of VOCs adsorbed and desorbed on zeolite filters using GC, which was not possible with the conventional SEM and EDS measurements
Summary
As the manufacturing of semiconductors has increased over the years, interest in the air pollution and safety issues arising from the manufacturing processes is increasing[1, 2]. During these processes, various volatile organic compounds (VOCs) are generated, and many studies are in progress on their collection and removal[3, 4]. Prolonged exposure to VOCs is fatal for the human body, and the major potential effects on health include acute and chronic respiratory effects, neurological toxicity, lung cancer, and eye and throat irritation[6]. Various technologies have been investigated for decomposing and filtering VOCs, including catalytic oxidation, thermal decomposition, nano-carbon based VOC absorbers[8, 9], and condensation using inorganic filters[10], bio filters[11, 12], TiO2 nano-photocatalysts[13], plasma[14], and zeolite filters[15]
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
