Quantitation of SEM EBIC and CL signals using Monte Carlo electron‐trajectory simulations

Abstract

AbstractA microcomputer Monte Carlo program simulates electron trajectories in solids and describes the distribution of energy deposited throughout the energy‐dissipation (electron‐hole pair generation) volume. From this distribution, the electron‐beam‐induced current or cathodoluminescence signal that will be generated can be calculated for the chosen beam conditions in a multilayer specimen of any geometry and compositions. The use of this program is illustrated by applications (1) to simulate curves of cathodoluminescence intensity versus beam energy for fitting to experimental data to evaluate materials and device parameters, (2) to calculate the energy deposited in each layer of a HEMT structure in which electron‐beam‐induced current studies are in progress, and (3) to the simulation of defect contrast linescan profiles which are compared to experimental observations.