Quantification of the sp3 content in Diamond-Like carbon Films: Effects of Ne plasma addition in Deep Oscillation Magnetron sputtering

Abstract

Diamond-like carbon (DLC) films are a class of amorphous carbon materials with unique properties, including high hardness and wear resistance, making them attractive for aerospace and automotive applications. Recently, High Power Impulse Magnetron Sputtering (HiPIMS) has emerged as a new route for magnetron-sputtered hard DLC films. The authors have previously demonstrated that adding Ne to the plasma significantly improves the properties of DLC films deposited by Deep Oscillation Magnetron Sputtering (DOMS), a HiPIMS variant. In this study, the sp3 content evolution with DLC film thickness was measured by Electron Energy Loss Spectroscopy (EELS) and Near Edge X-ray Absorption Spectroscopy (NEXAFS). The sp3 content in the top section of the film deposited in Ar + Ne plasma is close to 40 % and remains constant across the film thickness. Conversely, in films deposited in pure Ar plasma, the sp3 content decreases from approximately 30 % to 18 % towards the surface. Ne addition increases the sp3 content by enhancing the carbon ion flux and counteracting the atomic shadowing effect. These findings provide novel insights into the role of Ne in reducing the atomic shadowing effect and improving the overall quality of DLC films, paving the way for their optimized industrial use.