Abstract
The Glow Discharge Optical Emission Spectrometry (GDOES) depth profiles of coated-Ni/Fe foil are measured under different working conditions and evaluated quantitatively by the MRI-CRAS (Mixing-Roughness-Information-CRAter-Simulation) model. By a built-in interferometer, the measured sputtering time is converted to the sputtered depth. The best depth resolution and the optimal working conditions for the GDOES depth profiling of coated-Ni/Fe foil are obtained accordingly. The influences of the shape of sputtered crater and the grain size of Fe on the measured depth profile and the corresponding depth resolution are discussed.
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