Abstract
Here, we study the piezoresponse of epitaxial ferroelectric samples excited through top electrode structures with conductive tips in the global excitation mode and compare these results to displacement values obtained using artifact-free laser Doppler vibrometry (LDV) measurements. Substrate bending modes are studied using finite element simulations and LDV measurements and found to be negligible for top electrode diameters below 100 μm. The effect of electrostatic forces on the piezoresponse measurements is analyzed and methods for minimizing these are discussed. Using a resistive tip-electrode contact mode, the piezoresponse measurements are found to be in good agreement with values obtained from calibrations, providing a link between nanometer scale piezoresponse measurements and quantitative LDV measurements.
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