Abstract
Currently, microelectromechanical system (MEMS) spatial light modulators (SLMs) with numerous tiny mirrors that are controllable as a binary state are available. Such MEMS spatial light modulators are useful as holographic displays, optical tweezers, optical memories, reconfigurable lenses, etc. Although nonfault devices are always used for such applications, this paper clarifies that even if a part of a MEMS-SLM is faulty, the MEMS-SLM is useful for almost all commercial products related to the applications described above. Moreover, it is useful even as research equipment with a high degree of precision. This paper therefore presents the fault-tolerance analysis results of light intensity, contrast ratio, and spot size of interference pattern generated from a MEMS-SLM to clarify the allowable deteriorations of faulty MEMS-SLMs. Moreover, we propose a recovery method that a faulty MEMS-SLM can be used as a nonfaulty MEMS-SLM by exploiting excess laser power.
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