Abstract
In this paper, a novel quality factor trimming method for a 2-axis mode-matched resonator using thermoelastic dissipation (TED) is reported. A disk resonator was designed so that the Q-factor is mainly limited by TED, in which the effect of energy dissipation can be tuned by mechanical trimming. The trimming location are carefully chosen to independently modify the Q-factors of each axis. In addition, the trimming structure is designed not to affect the resonant frequencies. From the numerical experiment, the Q-factor trimming as much as 108% could be achieved while the frequency change was 4.7% at the maximum.
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