Abstract
A novel technique to enhance the quality factor (Q) of Lamb wave resonator by utilizing an aluminum nitride (AlN) plate formed in a butterfly shape is investigated in this paper. In the conventional design, the Q's of the micromachined Lamb wave resonators are largely harmed by the energy dissipation through the support tethers. The finite element analysis (FEA) simulation results show that the butterfly-shaped topology can efficiently change the displacement field in the AlN plate and reduce the vibration in the support tethers. The unloaded Q of the resonator is raised from 3,360 to 4,758 by simply using of the butterfly-shaped AlN plate with a tether-to-plate angle α = 59°, representing a 1.42× increase. The experimental Q's are also in good agreement with the anchor loss Q's computed using the PML-based FEA method.
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