Abstract
In this work we study the quality factor associated with dissipation due to scattering of shear horizontal surface acoustic waves by random self-affine roughness. It is shown that the quality factor is strongly influenced by both the surface roughness exponent H and the roughness amplitude w to lateral correlation length ξ ratio. Indeed, quality factors for roughness exponents H≥0.5 are comparable to quality factors due to intrinsic dissipation mechanisms (e.g., thermoelastic losses and phonon-phonon scattering) especially for wave vectors <1/ξ. Our results indicate that this dissipation mechanism should be carefully considered in the design micro/nanoelectromechanical systems.
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