Abstract
Here we report on a non-destructive, spatially resolving and easy to implement quality and parameter control method for high aspect ratio X-ray absorption gratings. Based on angular X-ray transmission measurements, our proposed technique allows to determine the duty cycle, the transmittance, the height, as well as the local inclination of the absorbing grating structures. A key advantage of the presented method is a fast and extensive grating quality evaluation without the need of implementing an entire grating interferometer. In addition to the local and surface-based analysis using a scanning electron microscope, our non-destructive method provides global averaged macroscopic and spatially resolved grating structure information without the requirement of resolving individual grating lines.
Highlights
Imaging and sensing techniques based on refraction and scattering of light found countless applications in science and technology
Local absorber inclination We found that Angular X-ray Transmission (AXT) measurements are well suited to determine small angle deviations of the lamellae from the ideal perpendicular orientation to the substrate
A homogeneous grating transmittance over the entire grating is on the other hand a clear indication of a constant duty cycle with perpendicular, well shaped absorbing grating lines
Summary
Imaging and sensing techniques based on refraction and scattering of light found countless applications in science and technology. In the last two decades, much effort has been invested to extend these modalities to the X-ray regime and exploit the penetrative properties of X-rays for phase-sensitive imaging [1,2,3,4,5]. The grating-based approach gained strong interest because of its wide availability and its flexibility in system design. After the first studies at synchrotron facilities [1] the method was extended to work with incoherent, polychromatic X-ray sources, utilizing the principle of a Talbot-Lau interferometer [2]. An additional dark field signal sensitive to small angle X-ray scattering was extracted from the interferometric data [3]. Many potential applications towards clinical imaging [4,5,6], nondestructive testing [7], security screening [8] and others have been reported
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