Qualification of Microwave SQUID Multiplexer Chips for Simons Observatory

Abstract

The Simons Observatory is a cosmic microwave background experiment stationed atop Cerro Toco, at an elevation of 5200 ms in Chile’s Atacama Desert. The receivers of the Observatory will contain more than 60,000 transition edge sensor bolometers. In order to read out this large detector count in a scalable manner, we utilize a microwave superconducting quantum interference device (SQUID) multiplexing scheme where each detector is inductively coupled to an rf SQUID, which in turn is inductively coupled to a GHz resonator. More than 2000 SQUIDs and resonators are fabricated on a single 76.2-mm-diameter silicon wafer. To qualify wafers before integration, we cryogenically screen ∼\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\sim$$\\end{document} 10% of the devices on each wafer by use of a standard set of measurements. From these data, we report parameter value trends in 47 wafers that were fabricated in the past two years. We show good control in key parameters such as frequency placement, internal quality factor, and response to applied flux. We demonstrate a wafer acceptance yield of 86%.