Quadrupole secondary ion mass spectrometer for simultaneous detection of positive and negative ions

Abstract

The purpose of this study was to design a quadrupole secondary ion mass spectrometer for simultaneous detection of both positive and negative ions of different mass. An original setup based on a quadrupole electrostatic deflector configuration that allows energy and spatial separation of all types of secondary ions was proposed. The device was modeled using the SIMION 3D program before building the prototype. Trajectory and acceptance calculations were provided. Positive and negative secondary ion mass spectra for molybdenum test samples were obtained. Copyright © 1999 John Wiley & Sons Ltd.