Abstract
The aim of this paper is the development of a PZT-driven apparatus for testing the force-deflection behavior of thin 0.1/0.5-㎜-thick plates. Thin plates are widely used as the diaphragm of pressure sensors, as they are much stronger than the thin films with thicknesses of up to several tens of ? that are used in MEMS applications. Therefore, a proper PZT actuator should be selected to acquire the static- and dynamic-material properties of these thin plates to perform testing in terms of the force and frequency responses. Based on the investigation of the PZT characteristics, a test apparatus is developed. It is verified for the Hastelloy C-276 that the static-force deflection, acquired through sample testing, is compatible with the theoretical one; moreover, the dynamic test is available up to approximately 20 ㎐.
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