Pyroelectric infrared device with multilayer compensation structure

Abstract

The compensation structure can help the pyroelectric device to suppress noise caused by environment effects. However, the traditional compensation structure is not helpful for device miniaturization. In addition, although the traditional compensation structure almost has no problem with thermal crosstalk, the reflective layer is necessary for the traditional compensation structure to restrain the optical crosstalk. Obviously, the reflective layer will increase device costs and process complexity. In this paper, we propose the multilayer compensation structure. The proposed structure utilizes the detection element to screen the compensation element, so that the compensation element is not subject to the input radiation flux, thereby eliminating optical crosstalk. And the intermediate isolation layer can suppress the heat conduction from detection element to compensation element, so that the thermal crosstalk can be suppressed. In order to verify the proposed structure, the thermal steady state analysis and transient state analysis have been done. Furthermore, the devices based on P(VDF-TrFE)/PZT composites were prepared and characterized to further verify the proposed structure.