Abstract
A new class of pyroelectric anemometers is described based on a thin, narrow NiCr film heater and two symmetric electrodes simultaneously deposited on a thin z-cut LiTaO 3 wafer. A NiCr ground plane is used on the other face. An a.c. voltage drives the heater to produce a thermal current at 2× the voltage frequency. This thermal current produces an a.c. electrical current at each electrode. The differential signal is a measure of the average temperature difference between the two electrodes. In the absence of a fluid flow velocity, U(∞), the signal is zero. When the fluid does flow, the signal is proportional to U 1 2 (∞) as expected and is proportional to the drive power squared. Flows as low as 1 cm/min in N 2 have been measured.
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