Abstract
Standard surface specifications for mid-spatial frequency (MSF) errors do not capture complex surface topography and often lose critical information by making simplifying assumptions about surface distribution and statistics. As a result, it is challenging to link surface specifications with optical performance. In this work, we present use of the pupil-difference probability distribution (PDPD) moments to assess general MSF surface errors and show how the PDPD moments relate to the relative modulation.
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