Abstract
A series of experiments has been performed to investigate the interaction of intense laser pulses with cryogenic noble gas droplets. Understanding of the time scales for this interaction is important for optimization of extreme ultraviolet (EUV) sources for next-generation lithography that utilize laser-produced plasmas. The temporal character of the plasma formed by the irradiation of micron-sized argon and krypton droplets with intense 200-mJ, 100-ps laser pulses was investigated using a pump-probe scheme. The evolution of the droplet plasma was assessed by monitoring delay-dependent x-ray and EUV emission, and by imaging frequency-doubled probe light scattered from the interaction region. Depending on the spectral region of interest and the droplet characteristics, the effective plasma lifetime extends from a few hundred picoseconds to several nanoseconds. These results are explained in terms of the plasma expansion, excitation emission, and recombination emission time scales.
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