Abstract
This paper presents the use of mesoporous silica skeletons as substrates for electroosmotic (EO) micropumps. Mesoporous silica skeletons have bimodal pore size distributions consisting of macropores and cation-permselective mesopores. These materials have the potential for high flow rate per power because the cation-permselective mesopores can generate an induced charge layer (ICL) and electroosmosis of the second kind (EO-2) under high applied electric fields. The diffuse charge layers induced by the electric field result in an EO-2 flow rate that increases quadratically with increasing electric field. In contrast, the flow rate of the more common electroosmosis of the first kind (EO-1) is linearly proportional to electric field. Here, we investigate the impact of finite pressure loads on the EO-2 flow rate with experiments and an engineering model to evaluate the potential of mesoporous skeletons for micropumping applications. Our results include analyses of maximum flow rate, maximum pressure, and flow rate with intermediate pressure loads. The results indicate the existence of a critical pressure load at which reverse pressure-driven flow significantly diminishes the EO-2 flow. We also investigate the scaling of flow rate per power with respect to substrate thickness and area, demonstrating significant increases in flow rate per power with thinner substrates and favorable scaling for miniaturization of EO-2 pumps.
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