Abstract
An experimental investigation was made of the conditions of excitation of electric discharges ensuring attainment of the maximum efficiency of KrF, ArF, and XeCl excimer lasers. The influence of the degree of ultraviolet preionisation on the lasing characteristics was different for KrF and XeCl lasers. The efficiencies achieved for KrF and ArF lasers were 3.9% and 2.1%, respectively.
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