Abstract
Ion pumps have the capability of pumping all gases of gas. Different phenomena are involved whens differnet gases are pumped. According to the pumping mechanisms in ion pump, gases can be divided in three rough groups: getterable gases, hydrogen and moble gases.Several different configurations of ion pumps have been developed through the years, to optimize their performance. Unfortunately, optimizing performance for one type of gas, often dimnishees performance for other gas. Diode ion pumps are the best choice for pumping getterable gases and hydrogen, but shown dramatic instability in pumping noble gases. Differential cathode ion pumps have a better behavior with noble gases, but slightly lower speeds for other gases. Triode ion pumps are stable when pumping noble gases, but have a reduced hydrogen capacity.The last generation of ion pumps has solved this problem: with a triode configuration and a unique cathode design, they have a high pumping speed for getterable gases, a pumping speed and pumping sta...
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