Abstract
Pulsed-laser deposition (PLD) has become a very popular technique for the fabrication of thin films of multicomponent materials. Among the materials studied in most detail are compound semiconductors, dielectrics, ferroelectrics, electrooptic and giant magnetoresistance oxides, high-temperature superconductors, polymers, and various types of heterostructures. PLD is very reliable, offers great experimental versatility, it is fairly simple and fast — as long as small-area films of up to several square-centimeters are to be fabricated. For these reasons, PLD is particularly suitable in materials research and development. The strong non-equilibrium conditions in PLD allow, however, some unique applications: Among those are metastable materials that cannot be synthesized by standard techniques and the fabrication of films from species that are generated only during pulsed-laser ablation. With certain systems, the physical properties of such films are superior to those fabricated by standard evaporation, electron-beam evaporation, etc.
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