Abstract
The processes d.c. arc, modified pulsed arc, d.c. steered arc and the combination of steered and pulsed arc were compared. Steered arc cathodes with different magnetic fields were used to obtain experimental results for spot movement, ion current, layer formation and droplet emission. The process combination of steered and pulsed arc was examined mainly. High-speed videos showed a clearly increased spot velocity and the enlargement of the eroded area. Measurements on total ion current verify the experiences of random pulsed arc. The angular distribution of ion current density led us to conclude a focused plasma column. In this case, the influence of the duty cycle is strongest. For example, the ion current density related to arc current in the perpendicular direction is increased by 35% for steered arc with pulses. Deposition experiments yielded an increased deposition rate and a reduced droplet density. Results available up to now need further confirmation. The influence of the magnetic field intensity has to be investigated systematically.
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