Abstract
The radiation transport involved in pulsed ultraviolet laser ablation of organic materials has been studied both theoretically and experimentally. A mathematical description of the absorption process that includes nonlinear effects such as chromophore saturation and multiphoton absorption is presented. This theoretical model accurately describes the observed polymer etch depth versus incident laser fluence relationship for various target materials, laser wavelengths, and pulse durations varying from nanoseconds to subpicoseconds. The theoretical analysis can also be used to explain observed nonlinearities in the transmission characteristics of polyimide subjected to intense KrF excimer laser irradiation.
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