Abstract
We report the laser-induced surface modification of InP in a HF electrolyte by second harmonic (532 nm) or fourth harmonic (266 nm) wavelengths of a Nd:YAG laser at a constant energy density of 125 mJ cm−2 and by varying the number of laser pulses. Laser-induced periodic surface structures (LIPSS) parallel to laser polarization are fabricated on InP by photochemical surface modification. Atomic force microscopy (AFM) is used to study the surface morphology of the modified InP surface. Photoluminescence (PL), micro-Raman spectroscopy investigations on LIPSS provide clear evidence of the crystalline nature of the fabricated structures. In addition, PL line-shape analysis is used to estimate size and size distribution of nanoscale features in the LIPSS fabricated by UV laser beams.
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