Abstract
Magnetic films were prepared by pulsed laser ablation of amorphous magnetic ribbons (composition Co67Cr7Fe4Si8B14, Fe73.5Nb3Cu1Si13.5B9, and Fe40Ni40B20) and permalloy foils (composition FexNi1-x with x=22,50). Depositions were performed in a vacuum of (2–4)×10-5 Pa by KrF excimer laser pulses at fluences of between 2 and 7 J cm2. Films were deposited on oxidized silicon wafers, placed 60–80 mm apart from the target. Films were analyzed by SEM, XRD, RBS, and EDS. Ferromagnetic resonance (FMR) spectra were studied at GHz frequencies. From RBS and EDS measurements it follows that the stoichiometry of the targets is preserved in the films to a large extent. The films deposited from amorphous targets remain amorphous. From FMR studies it follows that Fe and Fe-Ni rich films exhibit properties close to those of bulk alloys, having very low magnetization motion damping parameter (λ) of 7.0–7.8×107 rad/s, which are appropriate for fast magnetic sensors.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
