Abstract

Indium phosphide thin films were deposited on sapphire and GaAs(1 0 0) substrates by pulsed laser deposition using a XeCl excimer laser in argon background gas and in high vacuum. The grown film structure and morphology were observed by reflection high-energy electron diffraction, scanning electron microscopy, and atomic force microscopy. The films were grown on sapphire produced a reflection electron diffraction pattern of a disordered film. Introduction of an argon gas background enhanced the particulate formation. Epitaxial InP(1 0 0) film with oriented polyhedral islands were grown on hydrogen-cleaned GaAs(1 0 0) at a substrate temperature of ∼573 K at 1×10 −8 Torr background pressure. By varying the deposition parameters, relatively smooth InP films with average surface roughness of about 4–12 nm were obtained.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call