Pulsed laser deposition of gallium oxide films for high performance solar-blind photodetectors

Abstract

Monoclinic gallium oxide thin films were grown on (0001) sapphire at various substrate temperatures ranging from 400 to 1000 °C by pulsed laser deposition using a KrF excimer laser. The structural, optical and compositional properties of the films were analyzed by using x-ray diffraction, transmission electron microscopy, optical transmittance, and Rutherford backscattering spectroscopy. As the substrate temperature was increased to 800 °C, the gallium oxide film possesses single crystalline phase with a preferred growth orientation of (−201) plane and higher crystal quality than those at the other temperatures. Optical transmittance measurements reveal the films grown at 600-1000 °C exhibit a clear absorption edge at the deep ultraviolet region around 250 nm wavelength. Based on the results of Rutherford backscattering spectroscopy, the O/Ga ratio of gallium oxide film increased gradually with increasing substrate temperature. When the substrate temperature was raised to 800-1000 °C, the film composition was close to the formation of Ga2O3, indicating the O vacancies and defects were reduced. Furthermore, the films grown at 600 and 800 °C were chosen to fabricate solar-blind metal-semiconductor-metal photodetectors. At an applied bias of 5 V, the photodetector prepared with 800 °C-grown film has a lower dark current of 1.2 × 10−11 A and a higher responsivity of 0.903 A/W (at a wavelength of 250 nm) than those with 600 °C-grown films. The better device performance is ascribed to the higher crystal quality and fewer O vacancies in the 800 °C-grown film. Moreover, the results indicate the gallium oxide films presented in this study have high potential for deep ultraviolet photodetector applications.