Abstract
A repetitive pulsed high current generator has been developed and tested. It has been developed for generation of high-density plasma as an extreme ultraviolet (EUV) source. This generator has a peak output of current over 40 kA with a pulse width of less than 400 ns. The generator consists of a semiconductor switch and a magnetic pulse compression (MPC) unit. This paper reports the design details of the circuit and the magnetic switches.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
