Pulse chemical vapour infiltration of SiC in porous carbon or SiC participate preform using an r.f. heating system

Abstract

SiC was infiltrated into a porous carbon or an SiC particulate preform from a gaseous system of 6% CH3SiCl3-H2 using a pulse chemical vapour infiltration apparatus and r.f. heating at 1273 to 1423 K. At 1273 K, the SiC matrix infiltrated the porous carbon initially to half the thickness of the substrate and finally over the full thickness. After 10000 pulses, three-point flexural strength saturated at about 120MPa. SiC particulate preform made from an average particle size of 4μm was infiltrated by SiC. After 30000 pulses at 1273 K, the flexural strength of the composite increased to 200 to 220 M Pa.