Abstract
In this paper, we describe pull-in voltage measurement technique and results for the uniformity characterization of torsional micromirror arrays (MMAs). A simple measurement scheme using two illuminators and image processing was implemented. The MMAs were fabricated using two kinds of substrate; silicon on glass (SiOG) and silicon on insulator (SOI) wafers. Pull-in voltage distributions are presented, and the differences of two substrates on pull-in voltage distributions are compared
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