Pull-in Instability of Micro-switch Actuators: Model Review

Abstract

The existing three widely used pull-in theoretical models (i.e., one-dimensional lumped model, linear supposition model and planar model) are compared with the nonlinear beam mode in this paper by considering both cantilever and fixed-fixed type mi cro and nano-switches. It is found that the error o f the pull-in parameters between one-dimensional lumped model and the nonlinear beam model is large because the denominator of the electrostatic force is minim al when the electrostatic force is computed at the maximum deflection along the beam. Since both the linear superposition model and the slender planar model consider the variation of electrostatic force with the beam’s deflection, these two models not o nly are of the same type but also own little error of the pull-in parameters with the nonlinear beam model, the error brought by these two models attributes to tha t the boundary conditions are not completely satisf ied when computing the numerical integration of the def lection.