Abstract
Pull-in characteristics of microcantilevers subjected to both residual stress gradients and electrostatic fringing are investigated by extending the previous JMEMS work by Ou using an energy approach. The analysis results agree with those performed by finite-element simulation very well. Finally, a semi-analytical engineering formula is also presented for MEMS design engineers.
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Schedule a callMore From: IEEE transactions on device and materials reliability : a publication of the IEEE Electron Devices Society and the IEEE Reliability Society
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