Pull-in tests of MEMS specimens for characterization of elastic–plastic behavior

Abstract

This paper presents the experimental characterization of elastic–plastic behavior of the thin gold microstructures under an applied loading using electrostatic actuation. The test structures are designed and optimized to achieve high stress values in the double-clamped specimen with a rectangular cross-section. The stress–strain behavior and plastic strength of the microstructures is experimentally studied by measuring the static deflection of the central specimen, undergoing tensile stress, using electrostatic actuation. The tensile stress in the test specimen is estimated by the non-linear finite element method (FEM) simulations. The elastic–plastic behavior in the specimen is investigated by the repeated loading and measuring the variation in the pull-in voltage value and permanent deflection in the specimen with each loading cycle.