Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback

Abstract

Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon which implies the loss of reliability of micro-electromechanical systems. Therefore, it is necessary to understand its mechanism and then reduce the phenomenon. In this work, pull-in instability of a typical electrostatic MEMS resonator is discussed in detail. Delayed position feedback and delayed velocity feedback are introduced to suppress pull-in instability, respectively. The thresholds of AC voltage for pull-in instability in the initial system and the controlled systems are obtained analytically by the Melnikov method. The theoretical predictions are in good agreement with the numerical results. It follows that pull-in instability of the MEMS resonator can be ascribed to the homoclinic bifurcation inducing by the AC and DC load. Furthermore, it is found that the controllers are both good strategies to reduce pull-in instability when their gains are positive. The delayed position feedback controller can work well only when the delay is very short and AC voltage is low, while the delayed velocity feedback will be effective under a much higher AC voltage and a wider delay range.